以電磁驅動之二維高精度定位平台設計與控制

Abstract

本論文研究之目的是設計並實現一新型、長行程、二自由度運動的微米級定位平台。本研究是基於本精密運動實驗室以前對於電磁驅動器研究之基礎，再結合機構之設計，進行一創新型之微米級微步進定位平台之研製作為本研究之主要課題。我們所設計之新型電磁推力精密定位系統，其構造是由兩個主動式之線圈與一個兩端鑲有永久磁鐵之被動式移動平台所組成，而其驅動原理是利用電磁線圈與永久磁鐵間所產生之相互作用力，藉由調整輸入電磁線圈之電流，而改變運動平台之位置。因此特殊之機構設計使本研究之定位系統運行時，具有兩倍之推力。 首先，我們先設計與實現定位系統受控裝置並且對其建立與分析系統之動態模型，而後則分別建立PID控制器、適應模糊控制器與適應滑動模式控制器並且對滑軌之摩擦力作補償設計。由模擬與實驗結果證明此系統為可行的。 本論文所設計的平台在X與Y二維度之最大行程可達 ，且最高解析度為 ，平台整體尺度為 。平台主體機構採用鋁合金材料，以減輕定位平台之重量，導引裝置採用上銀科技之線性滑軌；致動裝置則X軸與Y軸分別使用兩組電磁驅動致動器來達成定位平台二維之運動。

This paper proposes a novel 2-DOFs positioner system with large travel ranges is presented. This research is a foundation studied to the electromagnetic driver in the past on the basis of the precise motion control laboratory, and Combine the design of the mechanism, that design a novel micro positioner is the main task of this research. We design a novel electromagnetic precise position system which is consisted of electrical-magnetic system (coil and permagnet) and motion pad. The movement of the motion pad is due to the repelling force between the coils and the magnets affixed to the pad. It's to change the position of the movement platform by adjusting the current of the electromagnetic coils. Therefore, the special mechanism designs while making the position system of this research motion, have double thrust.

First, the plant and the dynamic model are derived and analyzed. Next, PID controller, adaptive fuzzy controller and adaptive sliding mode controller are established and linear guide produce friction is compensated by Tustin model. From simulation and experiment results, possible implementation, and satisfactory performances, and have been demonstrated.

The concept of this system intends to achieve three goals: the first one is large traveling range within . The second is precision positioning within , and its size is as compact as . The subject organization of the platform adopts the aluminium alloy material, in order to lighten the weight of the localization platform, the guiding devices adopt the linear slide rail of Hiwin; X axle and Y axle separately use two electromagnetic actuator to reach the platform two-dimentional motion .