具雙面介電層之可穿戴且高靈敏的電容式壓力感測器研製

Abstract

隨著可穿戴電子裝置、醫療保健和智能機械的不斷發展，高性能撓性壓力感測器在近幾年中展現了巨大的應用前景。本研究開發了一種基於靜電紡絲纖維複合微圓柱結構介電層的新型高靈敏電容式壓力感測器，並透過將微結構整合為單面及雙面介電層，以此進行性能比較。所用之介電層微結構可以透過簡便、快速、低成本及尺寸易調整的微影翻模與電紡纖維製程來完成，不需要使用複雜且高汙染的蝕刻設備。所提出之感測器在受壓時可以透過靜電紡絲及微圓柱的形變來獲得更多的電容變化。實驗結果顯示所開發之可撓性電容式壓力感測器具有5.0 kPa-1的高靈敏度、25及50 ms的快速響應與回彈時間、2.5 mg的超低檢測限制、10000與5000次以上壓縮/彎曲循環無任何訊號衰減的高耐用及高可靠性。得益於上述的優秀性能，在脈搏監控、呼吸監控、關節角度監控及聲學檢測的人體可穿戴即時測試中都獲得了良好的結果。此外，為了增強感測器的適用性，將感測器進行矩陣化，精準地展示出空間中的壓力分佈；也透過將感測器與無線傳輸模組整合為電子皮膚系統並安裝於機械手臂，成功地藉由觸碰感知讓機械手臂進行自我停機的功能，這對於人機協同作業的應用是很重要的。這項研究滿足了那些追求高靈敏及耐用性需求的場合，並在實現高性能撓性電容式壓力感測器的領域達成一些貢獻。

With the development of wearable electronic devices, health care and smart machines, high-performance flexible pressure sensors have shown great application prospects in recent years. In this research, a new type of high-sensitivity capacitive pressure sensor based on the electrospun fiber composite micro-cylindrical dielectric layer is developed, and the performance is compared by integrating the microstructure into a single/dual-sided dielectric layer. The microstructure of the dielectric layer used can be completed through a simple, fast, low-cost and easy-to-adjust lithography and electrospinning process, without the use of complex and highly polluting etching equipment. The proposed sensor can improve more capacitance changes through electrospinning and micro-cylinder deformation when under pressure. Experimental results show that the developed flexible capacitive pressure sensor has a high sensitivity of 5.0 kPa-1, a fast response and recovery time of 25 and 50 ms, an ultra-low detection limit of 2.5 mg, high durability and reliability with up to 10,000 and 5,000 times compression/bending cycles without any signal attenuation. Thanks to such excellent performance, it has excellent results in human wearable real-time tests of pulse monitoring, breathing monitoring, joint angle monitoring and acoustic detection. In addition, in order to enhance the applicability of the sensor, the sensor is matrixed to show the pressure distribution in the space; the sensor and the wireless transmission module are also integrated into the E-Skin system and installed in the robot arm. And successfully made the robotic arm self-stop by touching the E-Skin, which is very important for the application of man-machine collaboration. This research satisfies those occasions that pursue high sensitivity and durability, and has made some contributions in the field of realizing high-performance flexible capacitive pressure sensors.