KrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用(II)

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dc.contributor國立臺灣師範大學機電工程學系;國立清華大學化學工程系zh_tw
dc.contributor.author李育德zh_tw
dc.contributor.author楊啟榮zh_tw
dc.date.accessioned2014-10-30T09:36:23Z
dc.date.available2014-10-30T09:36:23Z
dc.date.issued2001-07-31zh_TW
dc.identifierntnulib_tp_E0403_04_016zh_TW
dc.identifier.urihttp://rportal.lib.ntnu.edu.tw/handle/20.500.12235/37043
dc.languagechizh_TW
dc.relation（國科會專題研究計畫，NSC89-2216-E007-058）zh_tw
dc.titleKrF準分子雷射LIGA製程用厚膜光阻劑之合成與應用(II)zh_tw
dc.titleSynthesis and Application of Thick Film Resist Satisfied with KrF Excimer Laser LIGA Process(II)en_US

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